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Plasma Coating

Plasma spraying offers the possibility of coating a variety of material combinations due to the underlying process sequence. With a suitable handling station, the coating of three-dimensional basic substrates is possible.

The three-dimensional structure of functional layers is the subject of various research projects such as AgOn3D and CIMAMET.

Plasma-based coating technologies can be used to apply flexible die-top systems for power semiconductors.

  • Plasma-based plating technology enables cost-efficient and flexible copper metallisation, increasing the reliability and lifetime of power electronic modules
  • Inert atmosphere reduction allows plating under normal atmosphere, simplifying process handling and reducing equipment costs
  • The annealing process increases the adhesion between the metallisation and the substrate and also improves the coating quality.
  • The wafers are subsequently separated; the module structure with Cu-bond as the top-side connection is realised in subsequent processes.

Process flow

  1. Substrate preparation
  2. Metallisation
    a, Generation of the plasma
    b, Injection of the copper powder
    c, Gas-particle reaction
    d, Impingement on the substrate and layer formation
  3. Assembly and bonding technology

Advantages of Additive Plasma Coating

  • Low thermal load on the substrate
  • Wide range of substrates can be used (polymers, metals, ceramics)
  • Short process times, as no pre- and post-treatment is necessary
  • Environmentally friendly – chemical and solvent free
  • Coating of 3D surfaces

Unstructured Thermal Coating Process

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Fabrication of Conductive Path Structures on Planar Ceramic Substrates Using Plasma Deposition Processes

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Applying Electrically Conductive Structures to Plasterboard for the Production of Panel Heating Segments

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Testing the Suitability of Additively Applied Heating Structures on Wind Turbine Surfaces for De-icing

Installation of the Panel Heating Segments under Real Conditions Shows the Best Possible Results in Terms of Comfort

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Source of the text and video: FAPS, FAU, E|Home-Center
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